Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies

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Bibliographic Details
Other Authors: Tilli, Markku (Editor), Paulasto-Krockel, Mervi (Editor), Petzold, Matthias (Editor), Theuss, Horst (Editor), Motooka, Teruaki (Editor), Lindroos, Veikko (Editor)
Format: Electronic Resource
Language:English
Published: London Elsevier [2020]
Edition:Third edition.
Subjects:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Electronic books.
Online Access:Available for University of the Philippines System via ScienceDirect. Click here to access
Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy