Characterisation and control of defects in semiconductors

Bibliographische Detailangaben
Weitere Verfasser:	Tuomisto, Filip (HerausgeberIn)
Format:	Electronic Resource
Sprache:	English
Veröffentlicht:	London, United Kingdom The Institution of Engineering and Technology [2019]
Schlagworte:	Ion implantation. Magnetic resonance. Semiconductor doping. Semiconductors > Materials. Silicon. Electronic books.
Online Zugang:	Available for University of the Philippines Diliman via IET Digital Library. Click here to access Also available remotely for University of the Philippines Diliman via IET Digital Library. Click here to access thru EZproxy