An investigation into the supercritical CO₂/Co-solvent extraction of porogen and surfactant templates from organosilicate thin films for low-k applications
| Κύριος συγγραφέας: | |
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| Μορφή: | Electronic Resource |
| Γλώσσα: | Αγγλικά |
| Έκδοση: |
Ann Arbor Michigan
ProQuest Information and Learning Company
[2006]
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| Θέματα: | |
| Διαθέσιμο Online: | Full text access requires UP Webmail login |