An investigation into the supercritical CO₂/Co-solvent extraction of porogen and surfactant templates from organosilicate thin films for low-k applications

An investigation into the supercritical CO₂/Co-solvent extraction of porogen and surfactant templates from organosilicate thin films for low-k applications

書誌詳細
第一著者: Lubguban, Arnold A. (著者)
フォーマット: Electronic Resource
言語:English
出版事項: Ann Arbor Michigan ProQuest Information and Learning Company [2006]
主題:
Supercritical fluid extraction.
Carbon dioxide.
Solvent extraction.
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