Handbook of VLSI microlithography principles, technology, and applications

Bibliographische Detailangaben
Weitere Verfasser:	Glendinning, William B. (HerausgeberIn), Helbert, John N. (HerausgeberIn)
Format:	Electronic Resource
Sprache:	Englisch
Veröffentlicht:	Park Ridge, N.J. William Andrew [1991]
Schlagworte:	Integrated circuits > Very large scale integration. Microlithography. Electronic books.
Online-Zugang:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy