Handbook of VLSI microlithography principles, technology, and applications

Bibliographic Details
Other Authors:	Glendinning, William B. (Editor), Helbert, John N. (Editor)
Format:	Electronic Resource
Language:	English
Published:	Park Ridge, N.J. William Andrew [1991]
Subjects:	Integrated circuits > Very large scale integration. Microlithography. Electronic books.
Online Access:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy