Aluminum nitride/ air-gap structures fabricated via selective wet chemical etching
| मुख्य लेखक: | |
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| अन्य लेखक: | |
| स्वरूप: | थीसिस |
| भाषा: | अंग्रेज़ी |
| प्रकाशित: |
Quezon City
National Institute of Physics, College of Science, University of the Philippines Diliman
2013.
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| विषय: |