Aluminum nitride/ air-gap structures fabricated via selective wet chemical etching
| Prif Awdur: | |
|---|---|
| Awduron Eraill: | |
| Fformat: | Traethawd Ymchwil |
| Iaith: | Saesneg |
| Cyhoeddwyd: |
Quezon City
National Institute of Physics, College of Science, University of the Philippines Diliman
2013.
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| Pynciau: |