Aluminum nitride/ air-gap structures fabricated via selective wet chemical etching
| Egile nagusia: | |
|---|---|
| Beste egile batzuk: | |
| Formatua: | Tesis |
| Hizkuntza: | ingelesa |
| Argitaratua: |
Quezon City
National Institute of Physics, College of Science, University of the Philippines Diliman
2013.
|
| Gaiak: |