Planar magnetron plasma devices and applications
This dissertation has three contributions in the field of dusty plasma and thin films deposition by using planar magnetron plasma sputtering devices. A novel technique was developed in order to observe plasma dust without the need for major modification of the plasma machine. TiO2 was successfully...
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| Övriga upphovsmän: | , |
| Materialtyp: | Lärdomsprov |
| Språk: | English |
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Quezon City
National Institute of Physics, College of Science, University of the Philippines Diliman
2014.
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