Cover Image

Planar magnetron plasma devices and applications

Bibliographic Details
Main Author: Villamayor, Michelle Marie S. (Author)
Other Authors: Ramos, Henry J. (adviser.), Wada, Motoi (co-adviser.)
Format: Thesis
Language:English
Published: Quezon City National Institute of Physics, College of Science, University of the Philippines Diliman 2014.
Subjects:
Magnetrons.
Plasma devices.