Analysis of LPC data for wafer yield improvement using a combined data mining and visualization technique

Analysis of LPC data for wafer yield improvement using a combined data mining and visualization technique

Bibliografske podrobnosti
izdano v:Industrial engineering & management systems 2, 2 (2003 (D)).
Glavni avtor: Tien-Lung Sun
Drugi avtorji: Chih-Cheng Tsai
Format: Article
Jezik:English
Teme:
IC manufacturing.
Data mining tree.
Data visualization.
Parallel coordinates.
Decision tree.