Analysis of LPC data for wafer yield improvement using a combined data mining and visualization technique

Analysis of LPC data for wafer yield improvement using a combined data mining and visualization technique

Detaylı Bibliyografya
Yayımlandı:Industrial engineering & management systems 2, 2 (2003 (D)).
Yazar: Tien-Lung Sun
Diğer Yazarlar: Chih-Cheng Tsai
Materyal Türü: Makale
Dil:English
Konular:
IC manufacturing.
Data mining tree.
Data visualization.
Parallel coordinates.
Decision tree.