Analysis of LPC data for wafer yield improvement using a combined data mining and visualization technique

Analysis of LPC data for wafer yield improvement using a combined data mining and visualization technique

Bibliografiske detaljer
Udgivet i:Industrial engineering & management systems 2, 2 (2003 (D)).
Hovedforfatter: Tien-Lung Sun
Andre forfattere: Chih-Cheng Tsai
Format: Article
Sprog:English
Fag:
IC manufacturing.
Data mining tree.
Data visualization.
Parallel coordinates.
Decision tree.