Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Bibliographic Details
Published in:Surface Engineering Bulletin 4, 1-4 (2012).
Main Author: Valleti, Krishna
Format: Article
Language:English
Subjects:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.