Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

書目詳細資料
發表在:Surface Engineering Bulletin 4, 1-4 (2012).
主要作者: Valleti, Krishna
格式: Article
語言:English
主題:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.