Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Detaylı Bibliyografya
Yayımlandı:Surface Engineering Bulletin 4, 1-4 (2012).
Yazar: Valleti, Krishna
Materyal Türü: Makale
Dil:English
Konular:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.