Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Bibliografiska uppgifter
I publikationen:Surface Engineering Bulletin 4, 1-4 (2012).
Huvudupphovsman: Valleti, Krishna
Materialtyp: Artikel
Språk:English
Ämnen:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.