Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Bibliografske podrobnosti
izdano v:Surface Engineering Bulletin 4, 1-4 (2012).
Glavni avtor: Valleti, Krishna
Format: Article
Jezik:English
Teme:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.