Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Библиографические подробности
Опубликовано в::Surface Engineering Bulletin 4, 1-4 (2012).
Главный автор: Valleti, Krishna
Формат: Статья
Язык:English
Предметы:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.