Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Detalhes bibliográficos
Publicado no:Surface Engineering Bulletin 4, 1-4 (2012).
Autor principal: Valleti, Krishna
Formato: Artigo
Idioma:English
Assuntos:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.