Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Bibliografische gegevens
Gepubliceerd in:Surface Engineering Bulletin 4, 1-4 (2012).
Hoofdauteur: Valleti, Krishna
Formaat: Artikel
Taal:English
Onderwerpen:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.