Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

書誌詳細
出版年:Surface Engineering Bulletin 4, 1-4 (2012).
第一著者: Valleti, Krishna
フォーマット: 論文
言語:English
主題:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.