Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

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Pubblicato in:Surface Engineering Bulletin 4, 1-4 (2012).
Autore principale: Valleti, Krishna
Natura: Articolo
Lingua:English
Soggetti:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.