Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Bibliografski detalji
Izdano u:Surface Engineering Bulletin 4, 1-4 (2012).
Glavni autor: Valleti, Krishna
Format: Članak
Jezik:English
Teme:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.