Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

ग्रंथसूची विवरण
में प्रकाशित:Surface Engineering Bulletin 4, 1-4 (2012).
मुख्य लेखक: Valleti, Krishna
स्वरूप: लेख
भाषा:English
विषय:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.