Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Sonraí bibleagrafaíochta
Foilsithe in:Surface Engineering Bulletin 4, 1-4 (2012).
Príomhchruthaitheoir: Valleti, Krishna
Formáid: Alt
Teanga:English
Ábhair:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.