Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Bibliografiset tiedot
Julkaisussa:Surface Engineering Bulletin 4, 1-4 (2012).
Päätekijä: Valleti, Krishna
Aineistotyyppi: Artikkeli
Kieli:English
Aiheet:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.