Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Xehetasun bibliografikoak
Argitaratua izan da:Surface Engineering Bulletin 4, 1-4 (2012).
Egile nagusia: Valleti, Krishna
Formatua: Artikulua
Hizkuntza:English
Gaiak:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.