Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Bibliographische Detailangaben
Veröffentlicht in:Surface Engineering Bulletin 4, 1-4 (2012).
1. Verfasser: Valleti, Krishna
Format: Artikel
Sprache:English
Schlagworte:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.