Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Bibliografiske detaljer
Udgivet i:Surface Engineering Bulletin 4, 1-4 (2012).
Hovedforfatter: Valleti, Krishna
Format: Article
Sprog:English
Fag:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.