Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Manylion Llyfryddiaeth
Cyhoeddwyd yn:Surface Engineering Bulletin 4, 1-4 (2012).
Prif Awdur: Valleti, Krishna
Fformat: Erthygl
Iaith:English
Pynciau:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.