Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Dades bibliogràfiques
Publicat a:Surface Engineering Bulletin 4, 1-4 (2012).
Autor principal: Valleti, Krishna
Format: Article
Idioma:English
Matèries:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.