The fabrication process of capacitive pressure sensor and sensing circuits

The fabrication process of capacitive pressure sensor and sensing circuits

Sonraí bibleagrafaíochta
Foilsithe in:ASEAN journal on science & technology for development 28, 1 (2011(Mr)).
Rannpháirtithe: Tran Le Thien, Shuji Tanaka, Esashi, Masayoshi, Van Hieu, Nguyen
Formáid: Alt
Teanga:English
Ábhair:
Capacity pressure sensor.
Fabrication process.
Anodin bonding.
GaN Diode.
Low-pass filters.