The fabrication process of capacitive pressure sensor and sensing circuits

The fabrication process of capacitive pressure sensor and sensing circuits

Bibliographic Details
Published in:ASEAN journal on science & technology for development 28, 1 (2011(Mr)).
Other Authors: Tran Le Thien, Shuji Tanaka, Esashi, Masayoshi, Van Hieu, Nguyen
Format: Article
Language:English
Subjects:
Capacity pressure sensor.
Fabrication process.
Anodin bonding.
GaN Diode.
Low-pass filters.