Microelectronic test structures for CMOS technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

Täydet tiedot

Bibliografiset tiedot
Päätekijä: Bhushan, Manjul
Yhteisötekijä: SpringerLink (Online service)
Muut tekijät: Ketchen, Mark B.
Aineistotyyppi: Electronic Resource
Kieli:englanti
Julkaistu: New York Springer c2011.
Aiheet:
Linkit:Available for University of the Philippines Diliman via SpringerLink. Click here to access