Microelectronic test structures for CMOS technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

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Autor principal: Bhushan, Manjul
Autor corporatiu: SpringerLink (Online service)
Altres autors: Ketchen, Mark B.
Format: Electronic Resource
Idioma:English
Publicat: New York Springer c2011.
Matèries:
Accés en línia:Available for University of the Philippines Diliman via SpringerLink. Click here to access