Introduction to microfabrication

Bibliografski detalji
Glavni autor:	Franssila, Sami
Format:	Knjiga
Jezik:	English
Izdano:	Chichester, West Sussex John Wiley & Sons 2010.
Izdanje:	2nd ed.
Teme:	Microelectromechanical systems. Electronic apparatus and appliances. Microfabrication.