Introduction to microfabrication

Bibliografiske detaljer
Hovedforfatter:	Franssila, Sami
Format:	Bog
Sprog:	English
Udgivet:	Chichester, West Sussex John Wiley & Sons 2010.
Udgivelse:	2nd ed.
Fag:	Microelectromechanical systems. Electronic apparatus and appliances. Microfabrication.