Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation.
Computational efficiency is one of the major challenges of applying simulation to short-term operation scheduling of semiconductor wafer fabrication factories (fabs), which are characterized by re-entrant process flows, stringent production control requirements and fast changing technology and busin...
| প্রকাশিত: | IEEE Transactions on robotics and automation 17, 5 (2001). |
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| প্রধান লেখক: | |
| বিন্যাস: | প্রবন্ধ |
| ভাষা: | ইংরেজি |
| বিষয়গুলি: |