Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation.

Computational efficiency is one of the major challenges of applying simulation to short-term operation scheduling of semiconductor wafer fabrication factories (fabs), which are characterized by re-entrant process flows, stringent production control requirements and fast changing technology and busin...

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Bibliographic Details

Published in:	IEEE Transactions on robotics and automation 17, 5 (2001).
Main Author:	Bo-Wei Hsieh
Format:	Article
Language:	English
Subjects:	Dispatching rules. Dynamic rule selection. Machine failures. Optimal computing budget allocation techniques. Ordinal optimization-based simulation. Performance index. Production control requirements. Re-entrant process flows. Semiconductor wafer fabrication. Semiconductor wafer fabs. Short-term operation scheduling. Time horizon. Uncertainty handling. Wafers-in-process.