A new and improved structure of polysilicon resistor for subquarter micrometer CMOS device applications.

A new and improved structure of polysilicon resistor for subquarter micrometer CMOS device applications has been demonstrated and studied. A simple model is proposed to analyze its important parameters such as the voltage-dependent bulk sheet resistance, interface resistance, and voltage coefficient...

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التفاصيل البيبلوغرافية
الحاوية / القاعدة:IEEE Transactions on electron devices 50, 2 (2003).
المؤلف الرئيسي: Kong-Beng Thei
التنسيق: مقال
اللغة:English
الموضوعات: