Fundamentals of semiconductor manufacturing and process control

Fundamentals of semiconductor manufacturing and process control

Bibliografiske detaljer
Hovedforfatter: May, Gary S.
Andre forfattere: Spanos, Costas J.
Format: Bog
Sprog:English
Udgivet: Hoboken, N.J. Wiley-Interscience c2006.
Fag:
Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Process control > Statistical methods.