Fundamentals of semiconductor manufacturing and process control

Fundamentals of semiconductor manufacturing and process control

Bibliographic Details
Main Author: May, Gary S.
Other Authors: Spanos, Costas J.
Format: Book
Language:English
Published: Hoboken, N.J. Wiley-Interscience c2006.
Subjects:
Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Process control > Statistical methods.