Microfabrication and nanomanufacturing

Detalles Bibliográficos
Outros autores:	Jackson, Mark J.
Formato:	Libro
Idioma:	inglés
Publicado:	Boca Raton, Fla. CRC/Taylor & Francis 2006.
Subjects:	Microelectronics. Integrated circuits > Design and construction. Nanomanufacturing. Microelectromechanical systems > Design and construction.