Microfabrication and nanomanufacturing

Microfabrication and nanomanufacturing

Dades bibliogràfiques
Altres autors: Jackson, Mark J.
Format: Llibre
Idioma:English
Publicat: Boca Raton, Fla. CRC/Taylor & Francis 2006.
Matèries:
Microelectronics.
Integrated circuits > Design and construction.
Nanomanufacturing.
Microelectromechanical systems > Design and construction.