Microfabrication and nanomanufacturing

Microfabrication and nanomanufacturing

書目詳細資料
其他作者: Jackson, Mark J.
格式: 圖書
語言:English
出版: Boca Raton, Fla. CRC/Taylor & Francis 2006.
主題:
Microelectronics.
Integrated circuits > Design and construction.
Nanomanufacturing.
Microelectromechanical systems > Design and construction.