Development of a high sensitivity MEMS accelerometer for bipedal robots

MEMS accelerometers have various applications such as seismic activities monitoring, automotives, aerospace navigation systems and other inertial sensing applications. In particular, accelerometers together with gyroscopes are used for motion sensing of bipedal robots. High sensitivity capacitive ME...

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Bibliografiske detaljer

Hovedforfatter:	Manglicmot, Lester Ryan G.
Andre forfattere:	Minon, Jun King P.
Format:	Thesis
Sprog:	English
Udgivet:	2009
Fag:	Microelectromechanical systems > Design and construction. Robots > Kinematics. Accelerometers > Design and construction. Mobile robots. Bipedal robots. MEMS.