Development of a high sensitivity MEMS accelerometer for bipedal robots

MEMS accelerometers have various applications such as seismic activities monitoring, automotives, aerospace navigation systems and other inertial sensing applications. In particular, accelerometers together with gyroscopes are used for motion sensing of bipedal robots. High sensitivity capacitive ME...

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Bibliographic Details

Main Author:	Manglicmot, Lester Ryan G.
Other Authors:	Minon, Jun King P.
Format:	Thesis
Language:	English
Published:	2009
Subjects:	Microelectromechanical systems > Design and construction. Robots > Kinematics. Accelerometers > Design and construction. Mobile robots. Bipedal robots. MEMS.