Development of a high sensitivity MEMS accelerometer for bipedal robots
MEMS accelerometers have various applications such as seismic activities monitoring, automotives, aerospace navigation systems and other inertial sensing applications. In particular, accelerometers together with gyroscopes are used for motion sensing of bipedal robots. High sensitivity capacitive ME...
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| 格式: | Thesis |
| 语言: | English |
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2009
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