Development of a high sensitivity MEMS accelerometer for bipedal robots

MEMS accelerometers have various applications such as seismic activities monitoring, automotives, aerospace navigation systems and other inertial sensing applications. In particular, accelerometers together with gyroscopes are used for motion sensing of bipedal robots. High sensitivity capacitive ME...

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Bibliografiska uppgifter

Huvudupphovsman:	Manglicmot, Lester Ryan G.
Övriga upphovsmän:	Minon, Jun King P.
Materialtyp:	Lärdomsprov
Språk:	English
Publicerad:	2009
Ämnen:	Microelectromechanical systems > Design and construction. Robots > Kinematics. Accelerometers > Design and construction. Mobile robots. Bipedal robots. MEMS.