Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
| Egile nagusia: | |
|---|---|
| Formatua: | Liburua |
| Hizkuntza: | English |
| Argitaratua: |
Boca Raton, Fla.
CRC Press
c2005.
|
| Edizioa: | 2nd ed. |
| Saila: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Gaiak: |